Yuqori tozalik uglerod tetlerfluorid

Yuqori tozali uglerot tetrafluorid (99 {1 {1 {1 {1 {1 {1}.}}}}}}}}}}}}}}}}) iz cheklovlari bajarilishi mumkin bo'lgan arizalarni buzishi mumkin bo'lgan ariza berish uchun juda muhimdir. Fraktsion distillash va kimyoviy bug 'quyish orqali ishlab chiqarilgan, bu ko'rsatkich namlikda qat'iy cheklovlarni saqlaydi (<5 ppm), oxygen (<10 ppm), and reactive fluorocarbons. The semiconductor industry consumes 70% of global high purity carbon tetrafluoride production, primarily for dielectric etching in 3D NAND and DRAM fabrication. Specialized gas delivery systems using electropolished stainless steel and ultra-high vacuum valves ensure purity from cylinder to tool. Recent advancements include real-time mass spectrometry for impurity tracking and cylinder coatings that reduce particulate generation.

Issiq teglar: Yuqori tozali uglerot tetrafluorid, Xitoy yuqori poklik uglerod tetlerfluorid ishlab chiqaruvchilar, etkazib beruvchilar, zavod